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Research
Resolving
tip-convolution effect in SPM (supported by NSF, NIST, SME)
- The research objective is to develop theories and
algorithms for tip-specimen shape interaction modeling for an emerging class
of scanning probe microscopy (SPM) instruments that is capable of
imaging general 3D structures with vertical sidewalls and undercut
features at the nanometer or even atomic scale.
- If successful, the results of this research
will provide a
means to understand and correct potential dimensional bias in SPM
imaging of general 3D nanostructures. It
will lead to high accuracy and high throughput nano-imaging of general
3D nano-structures. It can benefit a host of industries that use SPM
such as semiconductor, data storage, MEMS, and molecular imaging
industries.
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Sample surface
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Resulting AFM
image through morphological dilation
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Spatial
relationship among AFM tip, undercut surface, image, and reconstructed
surface
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Recent
publications:
1.
Tian, F.,
Qian, X., and Villarrubia, J. S., "Blind estimation of general tip shape
in AFM imaging," Ultramicroscopy, Vol. 109, No. 1, pp. 44 - 53,
Dec 2008. [pdf]
2.
Qian, X. and
Villarrubia, J. S., "General
Three-Dimensional Image Simulation and Surface Reconstruction in Scanning
Probe Microscopy using a Dexel Representation,"
Ultramicroscopy, Vol. 107, No. 13, pp. 29 - 42,
Dec 2007. [pdf]
Collaborators:
John
Villarrubia (NIST)
Greg Dahlen (Veeco)
Last updated Feb 21, 2014.
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