Computational Design & Manufacturing Lab

University of Wisconsin-Madison

























Resolving tip-convolution effect in SPM (supported by NSF, NIST, SME)

  • The research objective is to develop theories and algorithms for tip-specimen shape interaction modeling for an emerging class of scanning probe microscopy (SPM) instruments that is capable of imaging general 3D structures with vertical sidewalls and undercut features at the nanometer or even atomic scale.
  • If successful, the results of this research will provide a means to understand and correct potential dimensional bias in SPM imaging of general 3D nanostructures. It will lead to high accuracy and high throughput nano-imaging of general 3D nano-structures. It can benefit a host of industries that use SPM such as semiconductor, data storage, MEMS, and molecular imaging industries.

Sample surface

Resulting AFM image through morphological dilation

Spatial relationship among AFM tip, undercut surface, image, and reconstructed surface


Recent publications:

1.      Tian, F., Qian, X., and Villarrubia, J. S., "Blind estimation of general tip shape in AFM imaging," Ultramicroscopy, Vol. 109, No. 1, pp. 44 - 53, Dec 2008. [pdf]

2.      Qian, X. and Villarrubia, J. S., "General Three-Dimensional Image Simulation and Surface Reconstruction in Scanning Probe Microscopy using a Dexel Representation," Ultramicroscopy, Vol. 107, No. 13, pp. 29 - 42, Dec 2007. [pdf]


John Villarrubia (NIST)

Greg Dahlen (Veeco) 












Last updated Feb 21, 2014.




web stats